Publicação
A differential mechanical profilometer for thickness measurement
| dc.contributor.author | Alves, J. Maia | pt |
| dc.contributor.author | Brito, M. C. | pt |
| dc.contributor.author | Serra, J. M. | pt |
| dc.contributor.author | Vallêra, A. M. | pt |
| dc.date.accessioned | 2010-07-27T08:55:11Z | |
| dc.date.available | 2010-07-27T08:55:11Z | |
| dc.date.issued | 2004 | pt |
| dc.date.submitted | 2004-01-21 | pt |
| dc.description.abstract | A low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 mm, independent of the sample thickness is achieved. | pt |
| dc.format | application/pdf | pt |
| dc.identifier.uri | http://hdl.handle.net/10451/1172 | |
| dc.language.iso | eng | pt |
| dc.publisher | American Institute of Physics | pt |
| dc.source | Rev. Sci. Instrum. 75, 12 (2004), 5362-5363 | pt |
| dc.subject | Differential profilometer | pt |
| dc.subject | Thickness measurement | pt |
| dc.title | A differential mechanical profilometer for thickness measurement | pt |
| dc.type | journal article | |
| dspace.entity.type | Publication | |
| rcaap.rights | openAccess | pt |
| rcaap.type | article | pt |