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A differential mechanical profilometer for thickness measurement

dc.contributor.authorAlves, J. Maiapt
dc.contributor.authorBrito, M. C.pt
dc.contributor.authorSerra, J. M.pt
dc.contributor.authorVallêra, A. M.pt
dc.date.accessioned2010-07-27T08:55:11Z
dc.date.available2010-07-27T08:55:11Z
dc.date.issued2004pt
dc.date.submitted2004-01-21pt
dc.description.abstractA low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 mm, independent of the sample thickness is achieved.pt
dc.formatapplication/pdfpt
dc.identifier.urihttp://hdl.handle.net/10451/1172
dc.language.isoengpt
dc.publisherAmerican Institute of Physicspt
dc.sourceRev. Sci. Instrum. 75, 12 (2004), 5362-5363pt
dc.subjectDifferential profilometerpt
dc.subjectThickness measurementpt
dc.titleA differential mechanical profilometer for thickness measurementpt
dc.typejournal article
dspace.entity.typePublication
rcaap.rightsopenAccesspt
rcaap.typearticlept

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