Lorenz, Katharina2021-07-262021-07-2620192162-87692162-8777http://hdl.handle.net/10451/49108N/AMicro-Opto-Electro-Mechanical Device Based on Flexible ß-Ga2O3 Micro-Lamellasjournal article2021-07-26cv-prod-69545110.1149/2.0441907jss